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The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle
Meng, Kun; Zhang, Weiping; Chen, Wenyuan; Li HY(李洪谊); Chi, Pengcheng; Zou, Caijun; Wu, Xiaosheng; Cui, Feng; Liu, Wu; Chen, Jinge
Department机器人学研究室
Source PublicationMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
ISSN0946-7076
2012
Volume18Issue:1Pages:127-136
Indexed BySCI ; EI
EI Accession number20120414710283
WOS IDWOS:000301638400014
Contribution Rank2
Funding OrganizationThis work are supported by the Open Foundation of State Key Laboratory of Robotics (R20200904), the support foundation of the Ministry of Education (62501040303) and the High Technology Research and Development Program of China_863 Program (2009AA04Z203), the Program for New Century Excellent Talents in University from Ministry of Education of China (NCET 10-0583).
AbstractAn electromagnetic MEMS flapping-wing micro air vehicle at insect scale is presented. The detailed scheme, design, micro fabrication and experiment are given in this paper. Firstly, by commercial software ANSYS and MATLAB, electromagnetic analysis, modal analysis and kinetics analysis are proposed. Moreover, based on the result of theoretical analysis, appropriate structure, material and inherent frequency are selected. Then, a new LIGA-like process based on SU-8 photoresist technology is adopted to fabricate thorax, tergum and vein. Finally, a 3.5 cm wingspan, 144 mg weight prototype is integrated, and then we finish the flapping test for this prototype, which has a flapping resonance frequency range of 120-150 Hz. The test result demonstrates the feasibility solution in the development of FMAV based on MEMS, this work is a stepping-stone on the path toward flying robotic insects.
Language英语
WOS HeadingsScience & Technology ; Technology ; Physical Sciences
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS KeywordMEMBRANE ; INSECT
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
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Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/10039
Collection机器人学研究室
Corresponding AuthorZhang, Weiping
Affiliation1.National Key Laboratory of Science and Technology on Nano/Micro Fabrication Technology, Research Institute of Mico/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
Recommended Citation
GB/T 7714
Meng, Kun,Zhang, Weiping,Chen, Wenyuan,et al. The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2012,18(1):127-136.
APA Meng, Kun.,Zhang, Weiping.,Chen, Wenyuan.,Li HY.,Chi, Pengcheng.,...&Chen, Jinge.(2012).The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,18(1),127-136.
MLA Meng, Kun,et al."The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 18.1(2012):127-136.
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