中国科学院沈阳自动化研究所机构知识库
Advanced  
SIA OpenIR  > 机器人学研究室  > 期刊论文
题名:
Laser-nanomachining by microsphere induced photonic nanojet
作者: Wen YD(文扬东); Wang FF(王飞飞); Yu HB(于海波); Li P(李盼); Liu LQ(刘连庆); Li WR(李文荣)
作者部门: 机器人学研究室
通讯作者: 刘连庆 ; 李文荣
关键词: Laser-nanomachining ; Photonic nanojet
刊名: Sensors and Actuators, A: Physical
ISSN号: 0924-4247
出版日期: 2017
卷号: 258, 页码:115-122
收录类别: SCI ; EI
产权排序: 1
项目资助者: National Natural ScienceFoundation of China (Project No. 61475183), the NSFC/RGC JointResearch Scheme (Project No. 51461165501 and N CityU132/14),CityU Internal Grant (Project No. 7004073), the External Coop-eration Program of Chinese Academy of Sciences (Grant No.173321KYSB20130006), and the CAS-FEA International PartnershipProgram for Creative Research Teams
摘要: The photonic nanojet generated by microsphere-based modulation of incident light has attracted much research attention in recent years because its full width at half maximum (FWHM) is less than the optical diffraction limit, which enables the microsphere to serve as a superlens to achieve super-resolution imaging. In addition to its sub-diffraction limited FWHM, the intensity of the photonic nanojet is also enhanced by several times that of the incident light. Here, we report sub-micrometer features that can be fabricated on MEMS-related materials by simply using a laser-induced photonic nanojet through microspheres. The influences of the diameter of silica microspheres and the initial power of laser beams on “nano-drilling” cavities on substrates were experimentally studied. Compared to the experiments without the microspheres, the resolution of the laser-micromachined structures was markedly improved using our approach. We have shown that it is possible to use a laser beam with initial beam width of 5 μm to fabricate 250 nm diameter cavities on silica substrates. We further simulated the photonic nanojet created by silica microspheres using the finite-difference time-domain (FDTD) computational technique to gain insights into the physical mechanisms of the photonic nanojet and its influence on the final nano-drilling results. This photonic nanojet-based nano-drilling method presents new opportunities for low-cost, high-throughput fabrication of nanoscale devices in the future.
语种: 英语
EI收录号: 20171203476732
WOS记录号: WOS:000400718200015
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sia.cn/handle/173321/20292
Appears in Collections:机器人学研究室_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
Laser-nanomachining by microsphere induced photonic nanojet.pdf(2419KB)期刊论文作者接受稿开放获取View 联系获取全文

Recommended Citation:
Wen YD,Wang FF,Yu HB,et al. Laser-nanomachining by microsphere induced photonic nanojet[J]. Sensors and Actuators, A: Physical,2017,258:115-122.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Wen YD(文扬东)]'s Articles
[Wang FF(王飞飞)]'s Articles
[Yu HB(于海波)]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Wen YD(文扬东)]‘s Articles
[Wang FF(王飞飞)]‘s Articles
[Yu HB(于海波)]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: Laser-nanomachining by microsphere induced photonic nanojet.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2017  中国科学院沈阳自动化研究所 - Feedback
Powered by CSpace