中国科学院沈阳自动化研究所机构知识库
Advanced  
SIA OpenIR  > 机器人学研究室  > 期刊论文
题名:
基于光诱导电化学沉积的金属微电极加工方法
其他题名: Fabrication of Metal Microelectrode Based on Optically Induced Electrochemical Deposition
作者: 关涛; 丛培田; 刘柱
作者部门: 机器人学研究室
通讯作者: 关涛
关键词: 光诱导电化学反应 ; 金属微电极 ; 原子力显微镜 ; 电极沉积
刊名: 传感技术学报
ISSN号: 1004-1699
出版日期: 2017
卷号: 30, 期号:5, 页码:650-654
收录类别: CSCD
产权排序: 1
项目资助者: 国家自然科学基金项目(51461165501,2015/01-2018/12)
摘要: 纳米材料具有独特的物理化学性质,在纳米电子器件和生物传感等方面显示了巨大的应用潜力。基于二维纳米材料的器件,需要利用金属电极来构建传感器或者场效应晶体管结构。目前,已有一些方法来制备金属电极,如光刻、聚焦离子束及纳米压印等方法,但是这些方法通常需要昂贵的设备,并且操作非常复杂。提出采用基于光诱导的金属纳米电极沉积方法,通过对多个实验参数(包括输入交流电信号的频率、幅值、溶液浓度以及氢化非晶硅层厚度)的分析,得到了优化的金属电极沉积条件。在此基础上,利用光学显微镜、原子力显微镜和扫描电子显微镜对制备的金属电极进行了表征。
英文摘要: Nanomaterials have unique physical and chemical properties,which have shown great potential in nano- electronic devices and nano-biosensors. Based on the two-dimensional nano-material devices,it is necessary to use the metal electrodes to create nano-sensors or field-effect transistor structures. At present,there are several methods to fabricate the metal electrodes such as lithography,focused ion beam(FIB) and nanoprinting. However,these methods often require the expensive equipments and are very complicated to operate. We propose a method of for the deposition of micro-electrodes,based on optically-induced metal electrodeposition, By analyzing the experimental parameters(including the frequency,amplitude,solution concentration and thickness of hydrogenated amorphous silicon layer),the optimized deposition conditions of the micro-electrodes were obtained. Then,the prepared micro- electrodes were characterized by the optical microscope,atomic force microscope(AFM) and scanning electron microscope(SEM).
语种: 中文
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.sia.cn/handle/173321/20777
Appears in Collections:机器人学研究室_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
基于光诱导电化学沉积的金属微电极加工方法.pdf(1370KB)期刊论文作者接受稿开放获取View 联系获取全文

Recommended Citation:
关涛,丛培田,刘柱. 基于光诱导电化学沉积的金属微电极加工方法[J]. 传感技术学报,2017,30(5):650-654.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[关涛]'s Articles
[丛培田]'s Articles
[刘柱]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[关涛]‘s Articles
[丛培田]‘s Articles
[刘柱]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: 基于光诱导电化学沉积的金属微电极加工方法.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2017  中国科学院沈阳自动化研究所 - Feedback
Powered by CSpace