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题名:
Submicron processing using laser-induced photonic nanojet
作者: Wen YD(文扬东); Wang FF(王飞飞); Yu HB(于海波); Liu LQ(刘连庆); LI WJ(李文荣)
作者部门: 机器人学研究室
通讯作者: Liu LQ(刘连庆) ; Li WJ(李文荣)
会议名称: 17th IEEE International Conference on Nanotechnology, NANO 2017
会议日期: July 25-28, 2017
会议地点: Pittsburgh, PA, United states
会议主办者: IEEE Nanotechnology Council (NTC)
会议录: 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017
会议录出版者: IEEE
会议录出版地: New York
出版日期: 2017
页码: 940-941
收录类别: EI ; CPCI(ISTP)
EI收录号: 20180604700428
WOS记录号: WOS:000434647500219
产权排序: 1
ISBN号: 978-1-5090-3028-6
摘要: In this paper, we propose a novel laser-induced photonic nanojet for micro/nanofabrication. The full width at half maximum of the nanojet is smaller than the diffraction limit, thus allowing for the fabrication of structures at the submicron scale. We first developed the experimental nanojet system, which consists of a laser source, an objective lens, a charge-coupled device camera, and a mobile platform capable of three-dimensional movement. Further, the experimental conditions were optimized by simulating the nanojet. The results showed that submicron features could be created successfully on gold electrodes. Thus far, it has been possible to form features as narrow as approximately 300 nm.
语种: 英语
Citation statistics:
内容类型: 会议论文
URI标识: http://210.72.131.170/handle/173321/21545
Appears in Collections:机器人学研究室_会议论文

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作者单位: 1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
3.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong, Hong Kong

Recommended Citation:
Wen YD,Wang FF,Yu HB,et al. Submicron processing using laser-induced photonic nanojet[C]. 17th IEEE International Conference on Nanotechnology, NANO 2017. Pittsburgh, PA, United states. July 25-28, 2017.Submicron processing using laser-induced photonic nanojet.
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