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Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing
Zhou PL(周培林)1,2,3; Yu HB(于海波)1,2; Zou WH(邹旿昊)1,2,3; Zhong Y(仲亚)1,2,3; Wang XD(王晓朵)1,2; Wang ZD(王志东)1,4; Liu LQ(刘连庆)1,2
Department机器人学研究室
Source PublicationOptics Express
ISSN1094-4087
2020
Volume28Issue:5Pages:6336-6349
Indexed BySCI ; EI
EI Accession number20201108286336
WOS IDWOS:000518435600035
Contribution Rank1
Funding OrganizationNational Natural Science Foundation of China (61727811, 61973298, 91748212, U1613220, 61821005) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; CAS-SAFEA International Partnership Program for Creative Research Teams
Abstract

High-quality micro/nanolens arrays (M/NLAs) are becoming irreplaceable components of various compact and miniaturized optical systems and functional devices. There is urgent requirement for a low-cost, high-efficiency, and high-precision technique to manufacture high-quality M/NLAs to meet their diverse and personalized applications. In this paper, we report the one-step maskless fabrication of M/NLAs via electrohydrodynamic jet (E-jet) printing. In order to get the best morphological parameters of M/NLAs, we adopted the stable cone-jet printing mode with optimized parameters instead of the micro dripping mode. The optical parameters of M/NLAs were analyzed and optimized, and they were influenced by the E-jet printing parameters, the wettability of the substrate, and the viscosity of the UV-curable adhesive.,Thus, diverse and customized M/NLAs were obtained. Herein, we realized the fabrication of nanolens with a minimum diameter of 120 nm, and NLAs with different parameters were printed on a silicon substrate, a cantilever of atomic force microscopy probe, and single-layer graphene.

Language英语
Citation statistics
Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/26444
Collection机器人学研究室
Corresponding AuthorYu HB(于海波); Liu LQ(刘连庆)
Affiliation1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China
3.University of Chinese Academy of Sciences, Beijing 100049, China
4.Department of Advanced Robotics, Chiba Institute of Technology, Chiba 275-0016, Japan
Recommended Citation
GB/T 7714
Zhou PL,Yu HB,Zou WH,et al. Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing[J]. Optics Express,2020,28(5):6336-6349.
APA Zhou PL.,Yu HB.,Zou WH.,Zhong Y.,Wang XD.,...&Liu LQ.(2020).Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing.Optics Express,28(5),6336-6349.
MLA Zhou PL,et al."Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing".Optics Express 28.5(2020):6336-6349.
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