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Microfluidic channel fabrication by PDMS-interface bonding
Chow, W.W.Y.; Kin Fong Lei; Guangyi Shi; Li WJ(李文荣); Qiang Huang
Department机器人学研究室
Source PublicationSmart Materials and Structures
ISSN0964-1726
2006
Volume15Issue:1Pages:S112-116
Indexed BySCI ; EI ; CPCI(ISTP)
EI Accession number2006059669220
WOS IDWOS:000235313500019
Contribution Rank3
AbstractA novel technique for bonding polymer substrates using PDMS-interface bonding is presented in this paper. This novel bonding technique holds promise for achieving precise, well-controlled, low temperature bonding of microfluidic channels. A thin (10-25 mu m) poly(dimethylsiloxane) (PDMS) intermediate layer was used to bond two poly(methyl methacrylate) (PMMA) substrates without distorting them. Microchannel patterns were compressed on a PMMA substrate by a hot embossing technique first. Then, PDMS was spin-coated onto another PMMA bare substrate and cured in two stages. In the first stage, it was pre-cured at room temperature for 20 h to increase the viscosity. Subsequently, it was bonded to the hot embossed PMMA substrate. In the second stage, PDMS was completely cured at 90 degrees C for 3 h and the bonding was successfully achieved at this relatively low temperature. Tensile bonding tests showed that the bonding strength was about 0.015 MPa. Microfluidic channels with dimensions of 300 mu m * 1.6 cm * 100 mu m were successfully fabricated using this novel bonding method.
Language英语
WOS HeadingsScience & Technology ; Technology
WOS SubjectInstruments & Instrumentation ; Materials Science, Multidisciplinary
WOS KeywordPOLY(DIMETHYLSILOXANE) ; SYSTEMS
WOS Research AreaInstruments & Instrumentation ; Materials Science
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Document Type期刊论文
Identifierhttp://ir.sia.cn/handle/173321/7376
Collection机器人学研究室
Affiliation1.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Shatin, NT, Hong Kong
2.Department of Mechatronic Engineering, Beijing Institute of Technology, Beijing, China
3.Micro and Nano Automation Laboratory, Shenyang Institute of Automation, CAS, Shenyang, China
Recommended Citation
GB/T 7714
Chow, W.W.Y.,Kin Fong Lei,Guangyi Shi,et al. Microfluidic channel fabrication by PDMS-interface bonding[J]. Smart Materials and Structures,2006,15(1):S112-116.
APA Chow, W.W.Y.,Kin Fong Lei,Guangyi Shi,Li WJ,&Qiang Huang.(2006).Microfluidic channel fabrication by PDMS-interface bonding.Smart Materials and Structures,15(1),S112-116.
MLA Chow, W.W.Y.,et al."Microfluidic channel fabrication by PDMS-interface bonding".Smart Materials and Structures 15.1(2006):S112-116.
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