SIA OpenIR  > 机器人学研究室
Polymer MEMS actuators for underwater micromanipulation
J.W.L. Zhou; Ho-Yin Chan; T.K.H. To; K.W.C. Lai; Li WJ(李文荣)
Source PublicationIEEE/ASME Transactions on Mechatronics
Indexed BySCI ; EI
EI Accession number2004338307909
WOS IDWOS:000222256500004
Contribution Rank3

Conventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper.

Citation statistics
Cited Times:88[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Affiliation1.Ctr. for Micro and Nano Syst., The Chinese University of Hong Kong, Shatin, Hong Kong
2.Micro and Nano Automation Lab., Shenyang Institute of Automation, Chinese Acad. of Sci., Shenyang, Liaoning, China
Recommended Citation
GB/T 7714
J.W.L. Zhou,Ho-Yin Chan,T.K.H. To,et al. Polymer MEMS actuators for underwater micromanipulation[J]. IEEE/ASME Transactions on Mechatronics,2004,9(2):334-342.
APA J.W.L. Zhou,Ho-Yin Chan,T.K.H. To,K.W.C. Lai,&Li WJ.(2004).Polymer MEMS actuators for underwater micromanipulation.IEEE/ASME Transactions on Mechatronics,9(2),334-342.
MLA J.W.L. Zhou,et al."Polymer MEMS actuators for underwater micromanipulation".IEEE/ASME Transactions on Mechatronics 9.2(2004):334-342.
Files in This Item: Download All
File Name/Size DocType Version Access License
YWQK000234.pdf(524KB)期刊论文出版稿开放获取ODC PDDLView Download
Related Services
Recommend this item
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[J.W.L. Zhou]'s Articles
[Ho-Yin Chan]'s Articles
[T.K.H. To]'s Articles
Baidu academic
Similar articles in Baidu academic
[J.W.L. Zhou]'s Articles
[Ho-Yin Chan]'s Articles
[T.K.H. To]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[J.W.L. Zhou]'s Articles
[Ho-Yin Chan]'s Articles
[T.K.H. To]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: YWQK000234.pdf
Format: Adobe PDF
All comments (0)
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.